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Zeiss

1540EsB

Metrology & InspectionZeiss 1540EsB family
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Gas delivery

XeF2 and H2O[1]

Optics

FESEM electron column[1]

What is it?

The Carl Zeiss 1540EsB Crossbeam is described as a FIB/SEM system. Its FESEM electron column is stated to have imaging performance approaching the 2 nm range, and its Ga ion column allows milling of materials from the sample. The system can deposit Pt, W, and SiOx from precursors in the Gas Injection System, which also includes XeF2 and H2O etch gases, and it has multiple detector options for different imaging modes.

What can it run?

Process applications and technology nodes documented for this tool.

  • imaging
  • milling
  • sputtering
  • deposition

What do the numbers mean?

Gas & chemistry1

Gas Injection System etch gases
XeF2 and H2O[1]
Accurate?

Optics & imaging4

Electron column
FESEM electron column[1]
Accurate?
Imaging resolution
resolution approaching the 2 nm range[1]
Accurate?
Ion column
Ga ion column[1]
Accurate?
Detector options
multiple detector options for different imaging modes[1]
Accurate?

Configuration & options3

System type
FIB/SEM system[1]
Accurate?
Milling capability
allows for milling (sputtering) of materials from the sample[1]
Accurate?
Deposition materials
Pt, W, and SiOx[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Gas Injection System etch gasesXeF2 and H2O[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the 1540EsB are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 1540EsB are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 1540EsB are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 1540EsB are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 1540EsB are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 1540EsB is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]cmdis.rpi.edu — cmdis.rpi.educmdis.rpi.edu
  2. [2]Carl Zeiss 1540EsB Crossbeam | Center for Materials, Devices, and Integrated Systems — cmdis.rpi.educmdis.rpi.edu
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Last updated Jul 29, 2026.

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