Zeiss

1540EsB

Metrology & Inspection Zeiss 1540EsB family

Research Quality: 40% complete

The Carl Zeiss 1540EsB Crossbeam is a FIB/SEM system. The Carl Zeiss 1540EsB Crossbeam has an FESEM electron column with imaging performance approaching the 2 nm range. The Carl Zeiss 1540EsB Crossbeam has a Ga ion column for milling materials from the sample.^[1]^[2]^[3]

Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

Gas delivery

XeF2 and H2O^[3]

Optics

FESEM electron column^[3]

What it is

The Zeiss 1540EsB Crossbeam is a FIB/SEM system. The Zeiss 1540EsB Crossbeam has a FESEM electron column and a Ga ion column. The Zeiss 1540EsB Crossbeam has multiple detector options for different imaging modes.^[3]^[1]^[2]^[4]

Applications

The Zeiss 1540EsB Crossbeam supports imaging, milling, sputtering, and deposition applications. The Zeiss 1540EsB Crossbeam can mill material with its Ga ion column and can deposit Pt, W, and SiOx through its Gas Injection System.^[3]^[1]^[2]

imaging
milling
sputtering
deposition

What do the numbers mean?

Gas & chemistry2

Gas Injection System etch gases: XeF2 and H2O^[3]
Gas delivery: XeF2 and H2O^[2]

Optics & imaging5

Electron column: FESEM electron column^[3]
Imaging resolution: resolution approaching the 2 nm range^[3]
Ion column: Ga ion column^[3]
Detector options: multiple detector options for different imaging modes^[3]
Imaging resolution: approaching the 2 nm range^[1]

Configuration & options4

System type: FIB/SEM system^[3]
Milling capability: allows for milling (sputtering) of materials from the sample^[3]
Deposition materials: Pt, W, and SiOx^[3]
Milling capability: allows milling (sputtering) of materials from the sample^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Gas Injection System etch gasesXeF2 and H2O^[3]
Gas deliveryXeF2 and H2O^[2]

Where are the manuals?

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Not publicly documented

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Frequently asked questions

What type of tool is the Zeiss 1540EsB?

The Zeiss 1540EsB Crossbeam is a FIB/SEM system.^[3]^[1]^[2]^[4]

What beam columns does the Zeiss 1540EsB have?

The Zeiss 1540EsB has a FESEM electron column and a Ga ion column.^[3]^[1]^[2]^[4]

What deposition materials are available through the Gas Injection System?

The Zeiss 1540EsB can deposit Pt, W, and SiOx from precursors installed in the Gas Injection System.^[3]^[1]^[2]

Not publicly documented

The following facts about the 1540EsB are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 1540EsB are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 1540EsB are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 1540EsB are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 1540EsB are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 1540EsB is not on record.
Answerable by: an OEM datasheet or a fab qualification report