Comparison ledger
Zeiss Axio CSM 700 and Zeiss LEO 1560, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | Axio CSM 700Zeiss | LEO 1560Zeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 6” wafer loading through the loadlock is possible |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss Axio | Zeiss LEO |
| Specifications | ||
| Configuration | with controller[1] | 6" stage and loadlock[2] |
| Wafer size | — | 6” wafer loading through the loadlock is possible[2] |
| Known issues | — | Some Flickering on image of chamber scope[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →