Comparison ledger
Zeiss CrossBeam 550 and Zeiss UEM, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | CrossBeam 550Zeiss | UEMZeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | Windows | — |
| Generation | — | — |
| Family | Zeiss CrossBeam 550 | Zeiss UEM |
| Specifications | ||
| Column | GEMINI II electron optical column[1] | — |
| Stage | 5-axes motorized stage (X, Y, Z (M), Tilt and Rotation)[1] | — |
| Airlock | Semi-automatic airlock[1] | — |
| Vibration compensation | Active suspensions to compensate for vibrations[1] | — |
| Control software | Zeiss SmartSEM software[1] | — |
| Control interface | Controlled via a dual joystick and a dedicated control panel; PC with two monitors[1] | — |
| Detector | InLens SE detector[1] | — |
| Available software for offline analysis and metrology | ProSEM software, MountainsMap 8.2 (coupled to 3DSM Metrology), SmartStitch[1] | — |
| Reserved use | Exclusively reserved for imaging dedicated to control of processes done in CMi by regular CMi users[1] | — |
| Sample holders | Carousel 9x10mm, multi-pin holder, Wafer Section, 4 Inch Wafer, 6 Inch Wafer, 6 Inch Mask[1] | — |
| Configuration | — | Brightfield[2] |
| Illumination Type | — | Reflected Light[2] |
| Binocular Angle | — | 45°[2] |
| Magnification | — | 8X[2] |
| Magnification Changer | — | 1.25X, 1.6X, 2X[2] |
| Illumination Power | — | 12 V, 60 watts[2] |
| Power Supply included | — | YES[2] |
| Stage Type | — | Coaxial X-Y[2] |
| Length | — | 273 mm (10.78 in)[2] |
| Width | — | 356 mm (14.016 in)[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →