Comparison ledger
Zeiss LEO 1560 and Zeiss Merlin, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | LEO 1560Zeiss | MerlinZeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 6” wafer loading through the loadlock is possible | 4" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss LEO | Zeiss Merlin |
| Specifications | ||
| Configuration | 6" stage and loadlock[1] | — |
| Wafer size | 6” wafer loading through the loadlock is possible[1] | — |
| Known issues | Some Flickering on image of chamber scope[2] | — |
| Instrument type | — | Scanning electron microscope (SEM)[3] |
| Column | — | GEMINI II[3] |
| Stage | — | 5-axis motorized stage (X, Y, Z, Tilt and Rotation)[3] |
| Loadlock | — | Semi-automatic airlock[3] |
| Control software | — | ZeissSmartSEM[3] |
| Available holders | — | mono samples, cleaved samples, and full 4 inch wafer[3] |
| Detectors | — | In-Lens, HE-SE2, EsB, and EDX detector[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →