Comparison ledger
Zeiss LEO 1560 and Zeiss O Inspect 322 CMM, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | LEO 1560Zeiss | O Inspect 322 CMMZeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 6” wafer loading through the loadlock is possible | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss LEO | Zeiss O Inspect 322 CMM |
| Cited variants | — |
|
| Specifications | ||
| Configuration | 6" stage and loadlock[2] | Measuring volume X = 300 mm, Y = 200 mm, Z = 200 mm[4] |
| Wafer size | 6” wafer loading through the loadlock is possible[2] | — |
| Known issues | Some Flickering on image of chamber scope[3] | — |
| P/N | — | 636520-9932-000[1] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →