Waferpedia

Comparison ledger

LEO 1560 versus Supra 55

Zeiss LEO 1560 and Zeiss Supra 55, side by side. Every value shown is drawn from its cited encyclopedia entry.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
LEO 1560Zeiss
Supra 55Zeiss
OEMZeissZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size6” wafer loading through the loadlock is possible—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyZeiss LEOZeiss Supra 55
Cited variants—
  • Supra 55 VP[1]
  • Supra 55 FESEM[2]
Specifications
Configuration6" stage and loadlock[3]Detectors:[5]
Wafer size6” wafer loading through the loadlock is possible[3]—
Known issuesSome Flickering on image of chamber scope[4]—
LEO 1560 entrySupra 55 entry

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (5)Every fact above is drawn from these public sources
  1. [1]bu.edubu.edu
  2. [2]cmdis.rpi.educmdis.rpi.edu
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]inventory listing