Comparison ledger
Zeiss Merlin and Zeiss O Inspect 322 CMM, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | MerlinZeiss | O Inspect 322 CMMZeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 4" | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss Merlin | Zeiss O Inspect 322 CMM |
| Cited variants | — |
|
| Specifications | ||
| Instrument type | Scanning electron microscope (SEM)[2] | — |
| Column | GEMINI II[2] | — |
| Stage | 5-axis motorized stage (X, Y, Z, Tilt and Rotation)[2] | — |
| Loadlock | Semi-automatic airlock[2] | — |
| Control software | ZeissSmartSEM[2] | — |
| Available holders | mono samples, cleaved samples, and full 4 inch wafer[2] | — |
| Detectors | In-Lens, HE-SE2, EsB, and EDX detector[2] | — |
| Configuration | — | Measuring volume X = 300 mm, Y = 200 mm, Z = 200 mm[3] |
| P/N | — | 636520-9932-000[1] |
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