Comparison ledger
Zeiss O Inspect 322 CMM and Zeiss sem2, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | O Inspect 322 CMMZeiss | sem2Zeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss O Inspect 322 CMM | Zeiss sem2 |
| Cited variants |
| — |
| Specifications | ||
| Configuration | Measuring volume X = 300 mm, Y = 200 mm, Z = 200 mm[2] | — |
| P/N | 636520-9932-000[1] | — |
| OEM | — | Zeiss[3] |
| Model | — | sem2[3] |
| Equipment name | — | Zeiss 200 mm Scanning Electron Microscope[3] |
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