Waferpedia

Comparison ledger

O Inspect 322 CMM versus sem2

Zeiss O Inspect 322 CMM and Zeiss sem2, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
sem2Zeiss
OEMZeissZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size200mm
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyZeiss O Inspect 322 CMMZeiss sem2
Cited variants
  • O-INSPECT 3 / 2 / 2[1]
Specifications
ConfigurationMeasuring volume X = 300 mm, Y = 200 mm, Z = 200 mm[2]
P/N636520-9932-000[1]
OEMZeiss[3]
Modelsem2[3]
Equipment nameZeiss 200 mm Scanning Electron Microscope[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]nanolab.berkeley.edunanolab.berkeley.edu