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Comparison ledger

O Inspect 322 CMM versus Supra 55

Zeiss O Inspect 322 CMM and Zeiss Supra 55, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
O Inspect 322 CMMZeiss
Supra 55Zeiss
OEMZeissZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyZeiss O Inspect 322 CMMZeiss Supra 55
Cited variants
  • O-INSPECT 3 / 2 / 2[1]
  • Supra 55 VP[2]
  • Supra 55 FESEM[3]
Specifications
ConfigurationMeasuring volume X = 300 mm, Y = 200 mm, Z = 200 mm[4]Detectors:[5]
P/N636520-9932-000[1]—
O Inspect 322 CMM entrySupra 55 entry

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Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]bu.edubu.edu
  3. [3]cmdis.rpi.educmdis.rpi.edu
  4. [4]inventory listing
  5. [5]inventory listing