Comparison ledger
Zeiss O Inspect 322 CMM and Zeiss UEM, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | O Inspect 322 CMMZeiss | UEMZeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss O Inspect 322 CMM | Zeiss UEM |
| Cited variants |
| — |
| Specifications | ||
| Configuration | Measuring volume X = 300 mm, Y = 200 mm, Z = 200 mm[2] | Brightfield[3] |
| P/N | 636520-9932-000[1] | — |
| Illumination Type | — | Reflected Light[3] |
| Binocular Angle | — | 45°[3] |
| Magnification | — | 8X[3] |
| Magnification Changer | — | 1.25X, 1.6X, 2X[3] |
| Illumination Power | — | 12 V, 60 watts[3] |
| Power Supply included | — | YES[3] |
| Stage Type | — | Coaxial X-Y[3] |
| Length | — | 273 mm (10.78 in)[3] |
| Width | — | 356 mm (14.016 in)[3] |
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