Waferpedia

Comparison ledger

Supra 55 versus UEM

Zeiss Supra 55 and Zeiss UEM, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
UEMZeiss
OEMZeissZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyZeiss Supra 55Zeiss UEM
Cited variants
  • Supra 55 VP[1]
  • Supra 55 FESEM[2]
Specifications
ConfigurationDetectors:[3]Brightfield[4]
Illumination TypeReflected Light[4]
Binocular Angle45°[4]
Magnification8X[4]
Magnification Changer1.25X, 1.6X, 2X[4]
Illumination Power12 V, 60 watts[4]
Power Supply includedYES[4]
Stage TypeCoaxial X-Y[4]
Length273 mm (10.78 in)[4]
Width356 mm (14.016 in)[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]bu.edubu.edu
  2. [2]cmdis.rpi.educmdis.rpi.edu
  3. [3]inventory listing
  4. [4]inventory listing