Comparison ledger
Accretech , Tokyo Semitsu Kogaku (TSK) UF200, KLA SFS 6420, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | , Tokyo Semitsu Kogaku (TSK) UF200Accretech | SFS 6420KLA |
|---|---|---|
| OEM | Accretech | KLA |
| Category | — | — |
| Wafer size | Wafer Equipment | Wafer Equipment |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Accretech , Tokyo Semitsu Kogaku (TSK) UF200 | KLA SFS 6420 |
| Specifications | ||
| Wafer size | Wafer Equipment[1] | Wafer Equipment[2] |
| Date of Manufacture | 1998[1] | — |
| Currently Configured for | 200mm[1] | — |
| Current Equipment Status | Available[1] | — |
| Available date | Currently Available[1] | — |
| Equipment category | Production Wafer Prober[1] | — |
| Power | — | 220V 50Hz 1 Phase[2] |
| Manufacturer | — | KLA-Tencor[2] |
| Model | — | SFS 6420[2] |
| Year | — | 1995[2] |
| Condition | — | Used[2] |
| Inspection type | — | Non-patterned wafer particle inspection[3] |
| Light source | — | Algon laser[3] |
| Voltage | — | 208V[3] |
| Phase | — | 1 phase[3] |
| Frequency | — | 50/60Hz[3] |
| Vacuum | — | ~-23 inHg[3] |
| External exhaust | — | 4" diagram, 2 holes for system and laser[3] |
| System software | — | 4.2[3] |
| Operating system | — | Windows 98[3] |
| Install type | — | stand-alone[3] |