Comparison ledger
Accretech , Tokyo Semitsu Kogaku (TSK) UF3000, KLA SFS 6420, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | , Tokyo Semitsu Kogaku (TSK) UF3000Accretech | SFS 6420KLA |
|---|---|---|
| OEM | Accretech | KLA |
| Category | — | — |
| Wafer size | Wafer Equipment | Wafer Equipment |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Accretech , Tokyo Semitsu Kogaku (TSK) UF3000 | KLA SFS 6420 |
| Specifications | ||
| Wafer size | Wafer Equipment[1] | Wafer Equipment[4] |
| Currently Configured for | 300mm[1] | — |
| With Chiller | SCU-600B[1] | — |
| Section 1 | Tool General Information[1] | — |
| Section 2 | Tool Specific Information[1] | — |
| Manufacturer | Accretech, Tokyo Semitsu Kogaku (TSK)[1] | KLA-Tencor[4] |
| Model | UF3000[1] | SFS 6420[4] |
| Category | Wafer Equipment[1] | — |
| Equipment type | Wafer Prober[1] | — |
| Tool status | In production[1] | — |
| Tool location | Cleanroom[1] | — |
| Chiller | SCU-600B[1] | — |
| Vendor tool serial number | F24006MZ[1] | — |
| Micron MISTI/LID number | FE3SKAA300(TMM)[1] | — |
| Year | 2004[2] | 1995[4] |
| Quantity | 9[3] | — |
| Short description | Fully Automated Prober[3] | — |
| Version | 300 mm[3] | — |
| Nickel chuck | 12 inch[3] | — |
| Front loading | 300 mm single FOUP loading[3] | — |
| Robot blade | Dual ceramic robot blade[3] | — |
| Software version | S5.0FC4[3] | — |
| Loader type | TSK[3] | — |
| Chuck temperature range | 30~150℃[3] | — |
| OCR camera type | Type6[3] | — |
| Auto card change | Yes[3] | — |
| Needle cleaning unit | 150 mm x 150 mm ceramics pad[3] | — |
| Manipulator | Hinge, MHF4000[3] | — |
| Test system interface | AL6050 & Focus3000[3] | — |
| Includes | Printer[3] | — |
| Power | — | 220V 50Hz 1 Phase[4] |
| Condition | — | Used[4] |
| Inspection type | — | Non-patterned wafer particle inspection[5] |
| Light source | — | Algon laser[5] |
| Voltage | — | 208V[5] |
| Phase | — | 1 phase[5] |
| Frequency | — | 50/60Hz[5] |
| Vacuum | — | ~-23 inHg[5] |
| External exhaust | — | 4" diagram, 2 holes for system and laser[5] |
| System software | — | 4.2[5] |
| Operating system | — | Windows 98[5] |
| Install type | — | stand-alone[5] |