Comparison ledger
Agilent PD 03 Helium Leak Detector, KLA 0035235-003 MMD Head, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | PD 03 Helium Leak DetectorAgilent | |
|---|---|---|
| OEM | Agilent | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Agilent PD 03 | KLA 0035235-003 MMD Head |
| Cited variants | — | |
| Specifications | ||
| Configuration | Refurbished in 2019, replaced an oil fore pump with a Teflon scroll pump[3] | TSTD PCB ASSY, MMD MEAS HEAD[5] |
| Primary pump type | Dry scroll pump[1] | — |
| Pumping speed | 3 m³/hr[1] | — |
| Minimum detectable leak rate | ≤ 5·10⁻¹² mbar·l/s[1] | — |
| Maximum inlet pressure | 13 mbar[1] | — |
| Helium pumping speed | 1.8 l/s[1] | — |
| Measurement ranges | 12 decades[1] | — |
| Time until ready | ≤ 2 min[1] | — |
| Response time | < 0.5 sec[1] | — |
| Dimensions (W x H x D) | 625 x 403 x 517 mm[1] | — |
| Display | 8.4 inch color TFT touch screen[4] | — |
| Interface | RS232 and analog (standard), discrete IO (optional)[1] | — |
| Operating voltage | 100-120 or 200-230 V, 50/60 Hz[4] | — |
| Remote control range | 100 meters[1] | — |
| Languages | Chinese, English, French, German, Japanese, Korean, Russian, Spanish[4] | — |
| Conforms to | CE, UL, CSA standards[1] | — |
| Application setups | Six pre-programmed key applications[4] | — |
| Manufacturer | Agilent[3] | — |
| Model | PD 03[3] | 0035235-003[5] |
| Category | Metrology & Inspection[2] | — |
| Tool type | portable dry helium leak detector[1] | — |
| Detection method | helium mass spectrometer leak detector[1] | — |
| Built-in pump | built-in turbo primary pump[2] | — |
| Make | — | KLA[5] |
| Part Description | — | TSTD PCB ASSY, MMD MEAS HEAD[5] |
| Compatible System | — | KLA AIT-XP[5] |
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