Agilent
PD 03 Helium Leak Detector
The Agilent PD 03 Helium Leak Detector is a portable dry helium leak detector. The Agilent PD 03 Helium Leak Detector is a helium mass spectrometer leak detector used to locate and measure very small leaks in enclosed systems or devices. The Agilent PD 03 Helium Leak Detector uses an oil-free scroll/diaphragm combination pump with a pumping speed of 3 m3/h.[1][2][3]
Power
100-120 or 200-230 V, 50/60 Hz[5]
Vacuum
Dry scroll pump[1]
Optics
portable dry helium leak detector[1]
What it is
The Agilent PD 03 is a portable dry helium leak detection unit. The Agilent PD 03 is a helium mass spectrometer leak detector designed to locate and measure very small leaks in enclosed systems or devices. The Agilent HLD PD03 Portable Dry Helium Leak Detector uses a mass spectrometer tuned to detect helium as a tracer gas.[1][3]
How it works
The Agilent PD 03 uses an oil-free scroll and diaphragm pump combination with a pumping speed of 3 m3 per hour. The Agilent PD 03 features a touch screen interface and built-in application setups that can shorten test cycles and support test repeatability. The Agilent PD 03 provides six pre-programmed application setups: Sniffing, Spray Method, High Sensitivity, Auto Sequencer, PPM Testing, and Split Flow. The Agilent PD 03 has a display range of 10-4 to 10-11. The Agilent PD 03 has a minimum detectable leak rate of 5 x 10-12 mbar l/s, a maximum inlet pressure of 13 mbar, and a helium pumping speed of 1.8 l/s. The Agilent PD 03 has RS232 and analog interfaces as standard, with discrete I/O as an option. The Agilent PD 03 conforms to CE, UL, and CSA standards.[1][3]
Where it fits in the process flow
Applications
The Agilent PD 03 is applied in semiconductor production, scientific research, electron microscopes, experimental chambers, surface analytical systems, space chambers, power generation condensers, heat exchangers, steam circuits, automotive work, electrical and refrigeration systems, hermetic packaging, medical and implantable devices, and industrial process tools such as vacuum furnaces, electron beam welding systems, and coating systems.[1][6]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- A calibrated leak requires updating.
- The turbo to achieve high vacuum fails and needs replacing.
What do the numbers mean?
Power & electrical1
Vacuum & pumping12
Optics & imaging2
Control & software2
Dimensions & facilities1
Configuration & options15
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| HLD PD03 | — | — | Portable dry leak detection unit with built-in application setups, touch screen interface, and oil-free scroll/diaphragm pump combination. | heliumleakdetection.net[1] |
| G8610B | — | — | Includes an internal oil-free IDP-3 dry scroll vacuum pump with a pumping speed of 3.6 m3/h. | waferpedia.com[2] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationRefurbished in 2019, replaced an oil fore pump with a Teflon scroll pump[4]
- ConfigurationThe turbo to achieve high vacuum fails, needs replacing[4]
- Primary pump typeDry scroll pump[1]
- Pumping speed3 m³/hr[1]
- Pumping speed3.6 m³/h (3 CFM)[5]
- Minimum detectable leak rate≤ 5·10⁻¹² mbar·l/s[1]
- Maximum inlet pressure13 mbar[1]
- Helium pumping speed1.8 l/s[1]
- Operating voltage100-120 or 200-230 V, 50/60 Hz[5]
- Primary pump typeoil-free scroll/diaphragm combination pump[1]
- Pumping speed3 m3/h[1]
- Minimum detectable leak rate≤ 5 × 10^-12 mbar l/s[1]
- Built-in pumpbuilt-in turbo primary pump[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What kind of leak detector is the Agilent PD 03?
The Agilent PD 03 is a portable dry helium leak detection unit and a helium mass spectrometer leak detector for locating and measuring very small leaks in enclosed systems or devices.[1]
What pump arrangement does the Agilent PD 03 use?
The Agilent PD 03 uses an oil-free scroll and diaphragm pump combination with a pumping speed of 3 m3 per hour.[1][3]
What is the minimum detectable leak rate of the Agilent PD 03?
The Agilent PD 03 has a minimum detectable leak rate of 5 x 10-12 mbar l/s.[1]
What application setups are available on the Agilent PD 03?
The Agilent PD 03 provides six pre-programmed application setups: Sniffing, Spray Method, High Sensitivity, Auto Sequencer, PPM Testing, and Split Flow.[1][3]
Where is the Agilent PD 03 used in semiconductor work?
The Agilent PD 03 is used in semiconductor production for process tools, gas panels, and gas transfer lines.[1]
Not publicly documented
The following facts about the PD 03 Helium Leak Detector are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PD 03 Helium Leak Detector are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the PD 03 Helium Leak Detector are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the PD 03 Helium Leak Detector is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the PD 03 Helium Leak Detector are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the PD 03 Helium Leak Detector are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]heliumleakdetection.net — heliumleakdetection.netheliumleakdetection.net
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]Agilent Technologies - HLD PD03 Portable Dry Helium Leak Detector Community, Manuals and Specifications | LabWrench — labwrench.comlabwrench.com
- [4]Inventory photo
- [5]idealvac.com — idealvac.comidealvac.com
- [6]Agilent Varian PD03 Helium Leak Detector | HVS Leak Detection — heliumleakdetection.netheliumleakdetection.net
Last updated Oct 21, 2026.
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