Comparison ledger
AJA ATC 1500 F, AJA ATC 2036 E, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ATC 1500 FAJA | ATC 2036 EAJA |
|---|---|---|
| OEM | AJA | AJA |
| Category | Deposition | Deposition |
| Wafer size | — | 15-20” adjustable length from source to wafer |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | AJA ATC | AJA ATC |
| Cited variants | — | |
| Specifications | ||
| Configuration | Substrate size up to 3”[2] | Temescal Multu-Pocket Rotary E-Beam Source[4] |
| Tool type | sputter coater[2] | — |
| Category | Deposition[3] | Deposition[5] |
| Substrate size | up to 3 inches[2] | — |
| Targets | 4[2] | — |
| Power supply | Kurt J Lesker R301 RF Power Supply[2] | — |
| Vacuum gauge controller | Granville-Phillips Series 307 Vacuum Gauge Controller[3] | — |
| Matching network controller | SEREN MC2 Matching Network Controller[2] | — |
| Magnetron drive | Advanced Energy MDX500 Magnetron Drive (2x)[2] | — |
| Automatic matching network | SEREN AT-3 Automatic Matching network[2] | — |
| Pump controller | Pfeiffer pump controller DCU (2x)[2] | — |
| Vacuum pumps | not included[2] | — |
| Magnetic manipulator | included[2] | — |
| Wafer size | — | 15-20” adjustable length from source to wafer[4] |
| Chamber Front | — | Double hinged door with locking mechanism[4] |
| Model | — | ATC 2036 E[4] |
| Source-to-wafer length | — | 15-20 inch adjustable[5] |
| Evaporation source | — | Temescal Multu-Pocket Rotary E-Beam Source[4] |
| Deposition controller | — | Quartz Crystal Deposition Controller[4] |
| Substrate holder | — | Water Cooled Substrate Holder[4] |
| Load-lock | — | Load-Lock[4] |
| Chamber dimensions | — | Nominal 36" high x 20" depth x 20" wide[4] |
| Chamber construction | — | Flat front; S/S vacuum chamber[4] |
| Vacuum gauge package | — | Vacuum Gauge Package with Cables[4] |
| Vacuum pumping | — | Brooks Cryo-Torr 8 straight cryo-pump with compressor (Model: 8200, water cooled); 16 cfm Pfeiffer (Adixen / ACP) dry, lobe type backing pump with fast acting inlet valve; AJA automated pumping system controlled and displayed via Touch Screen Controller[4] |
| Source type | — | 6 pocket rotary e-beam source[1] |
| Substrate heating | — | 1000°C substrate heating[1] |
| Substrate shutter | — | Programmable linear substrate shutter for wedge films[1] |
| Spare | — | 16 cfm Pfeiffer (Adixen / ACP) Dry, lobe type backing pump with fast acting inlet valve for power failure[4] |
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