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0010-03485 Magnet AssyversusSurfscan 6200 Refurbishment Services

Applied Materials 0010-03485 Magnet Assy, KLA Surfscan 6200 Refurbishment Services, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
OEMApplied MaterialsKLA
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-03485 Magnet AssyKLA Surfscan 6200
Specifications
ConfigurationWP AL 300mm PVD[1]Refurbishment Only of Client System[5]
OEMApplied Materials[1]—
Model0010-03485[1]—
DescriptionMAGNET ASSY, WP AL 300MM PVD[2]—
ProcessPVD[3]—
Wafer size300mm[4]—
VersionSpares[4]—
Part Number0010-03485[1]—
ManufacturerApplied Materials[1]—
Process TypePVD (Physical Vapor Deposition)[1]—
Application (Material)Aluminum (AL)[1]—
Wafer Diameter (associated)300 mm[1]—
Machine type—Wafer surface contamination analysis system and laser particle detector for measuring defect densities on unpatterned wafers[6]
Illumination source—Argon-ion laser at 488 nm[6]
Detection sensitivity—Detection sensitivity down to 0.10 µm[6]
Defect detection capability—Locates, sizes, and counts defects in semiconductor substrate material down to 0.157 um at a 95% capture rate and down to 0.09 um at an 80% capture rate[7]
Scanning method—Laser beam scanning for detecting defect contamination[7]
Data display—Color-coded wafer maps, histograms, and summaries[7]
Substrate diameter—125 mm[7]
Gain range—1 to 8 (gain=1 corresponds to size 63 um or 250 um2; gain=8 corresponds to size 0.12 um or 0.005 um2)[7]
LPD count limit—0 to 99999[7]
Throughput settings—High, medium, normal, low[7]
Detection mechanism—Laser beam illumination, scattered-light collection through an optics system, and photomultiplier tube (PMT) amplification[7]
Refurbishment service scope—Refurbishment only of client system[5]
Refurbishment laser—Solid state laser with 3 year warranty[5]
Refurbishment SBC—New/upgraded SBC replacing the old Trenton SBC[5]
Refurbishment storage—Solid state hard drive and solid state back up hard drive[5]
Refurbishment connectivity—USB 2.0 ready, new USB mouse, new USB keyboard[5]
Refurbishment warranty—1 year parts warranty on system[5]
Refurbishment lead time—12 to 16 weeks (depending on production schedule)[5]
Sources (7)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]layla-ec.comlayla-ec.com
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]inventory listing
  6. [6]waferpedia.comwaferpedia.com
  7. [7]wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu