Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, KLA P 16 +, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | P 16 +KLA |
|---|---|---|
| OEM | Applied Materials | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | KLA P 16 + |
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[1] | 2A, 20in Hg @ 1cfm[2] |
| Phase | — | 1 Phase[2] |
| Software | — | (OS) version 7.31.05 [Build 5][2] |
| Tool type | — | Stylus profilometer[3] |
| Measurement type | — | Step height, roughness, waviness, stress[3] |
| Vertical range | — | 327 µm[3] |
| Wafer sizes | — | 2, 3, 4, 5, 6, 8, 12 inch[3] |
| Stage | — | Fully motorized X-Y, Z, theta, and level stage[3] |
| Stylus | — | 2 µm / 60D[3] |
| Operating system | — | Windows XP[3] |
| Applications | — | CMP monitoring and bump metrology[3] |
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