Comparison ledger
Applied Materials Centura I Phase II Oxide, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Centura I Phase II OxideApplied Materials | 1512eTegal |
|---|---|---|
| OEM | Applied Materials | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials Centura | Tegal 1512e |
| Specifications | ||
| Configuration | Upgradable to 8"[1] | — |
| Need to replace | 5-phase motor driver, indexer, turbo pump and controller, e-chuck, MFC's[1] | — |
| Wafer size (original) | 6 inch[1] | — |
| Wafer size (upgrade target) | 8 inch (200 mm)[1] | — |
| Wafer size (alternate configuration) | 200 mm[2] | — |
| Model designation alternative | 5200 Centura I Phase II[2] | — |
| Tool type | — | Industrial RIE plasma etcher system[3] |
| Stated configuration | — | With modules assembly for CI-4222[3] |
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