Waferpedia

Comparison ledger

D8Dversus.204 PSL Wafer

Bruker D8D, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
D8DBruker
OEMBrukerKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBruker D8DKLA .204 PSL Wafer
Cited variants
  • Bruker D8D Plus[1]
—
Specifications
Equipment typeXRD system[1]—
SetupBragg-Brentano parafocusing setup for powder analysis[1]—
CapabilityIn situ heating analysis for bulk and powder samples[1]—
StageMulti-sample stage with automated acquisition[1]—
equipment typeX-ray diffraction system[1]—
X-ray sourceHigh intensity low-divergence collimated X-ray source[1]—
goniometerATLAS Goniometer with non-coplanar arm[1]—
detectorEIGER2 R 500K detector with 0D/1D/2D multi-mode operation[1]—
analysis modesXRR, GI-SAXS/WAXS, pole figure and residual stress analysis[1]—
additional capabilitiesIn situ heating and electrochemical analysis[1]—
instrument contextListed under nanoFAB surface spectroscopy and X-ray diffraction capabilities[1]—
Instrument typeX-Ray Diffraction (XRD) system[1]—
Analysis techniquesXRR, GI-SAXS/WAXS, Pole figure and residual stress analysis[1]—
In situ capabilitiesIn situ heating and electrochemical analysis[1]—
Sample typesPowder, thin film, bulk, and colloidal samples at ambient and non-ambient conditions[1]—
Advanced techniquesNon-Coplanar Scan, Pole Figure, 2D Stress Measurement, and Multi-Angle Scattering[2]—
Analysis modeIn situ heating analysis for bulk and powder samples[1]—
AcquisitionMulti-sample stage with automated acquisition[1]—
Analysis capabilityIn situ heating analysis for bulk and powder samples[1]—
Advanced XRD techniquesNon-Coplanar Scan, Pole Figure, 2D Stress Measurement, and Multi-Angle Scattering[2]—
setupBragg-Brentano parafocusing setup[1]—
applicationpowder analysis[1]—
X-ray source typeHigh intensity low-divergence collimated X-ray source[1]—
AnalysisIn situ heating analysis for bulk and powder samples[1]—
Applicationsphase composition, particle size, crystal structure, and orientation analysis[1]—
Operating conditionsambient and non-ambient conditions[1]—
Related systemBruker D8D Plus XRD[1]—
Measurement setupBragg-Brentano parafocusing setup for powder analysis[1]—
Sample handlingMulti-sample stage with automated acquisition[1]—
configurationBragg-Brentano parafocusing setup for powder analysis[1]—
Optical/setupBragg-Brentano parafocusing setup for powder analysis[1]—
AutomationMulti-sample stage with automated acquisition[1]—
CapabilitiesAnalysis of phase composition, particle size, crystal structure, and orientation[1]—
Configuration—NIST Traceable[3]
Wafer Size—8 inch[4]
Traceability—NIST[5]
Compatible Tools—Surfscan 6xy0, Sp1[3]
NIST Traceable—Yes[4]
Compatible tools—Surfscan 6xy0 and Sp1 particle counters[4]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (5)Every fact above is drawn from these public sources
  1. [1]nanofab.ualberta.cananofab.ualberta.ca
  2. [2]nanofab.ualberta.cananofab.ualberta.ca
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com
  5. [5]waferpedia.comwaferpedia.com