Comparison ledger
CEE 1000 Hot Plate, Mattson SHS 2800 RTA, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SHS 2800 RTAMattson | |
|---|---|---|
| OEM | CEE | Mattson |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CEE 1000 Hot Plate | Mattson SHS 2800 RTA |
| Specifications | ||
| Configuration | 4"[1] | Front End[2] |
| Type | Hot Plate[1] | rapid thermal anneal system[4] |
| Wafer Size | 4 inch[1] | — |
| Process | — | Oxid (BPSG + RTP)[2] |
| Voltage | — | 380 V, 63.0 A, 50/60 Hz, 3 Phase[2] |
| Make | — | Mattson[2] |
| Model | — | SHS 2800[4] |
| Category | — | Thermal / Diffusion[4] |
| Temperature measurement | — | Ripple Pyrometer[2] |
| Cooling | — | Jet Venturi System[2] |
| Electrical | — | 380 V, 63.0 A, 50/60 Hz, 3 Phase[2] |
| Vintage | — | 2000[2] |
| Manufacturer | — | Mattson[4] |
| Control configuration | — | Front End; tool-controller configurations[4] |
| Control software | — | Win7 (Updated 2018) / Win7 (Updated 2019)[4] |
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