Comparison ledger
CEE 1000 Hot Plate, Tokyo Electron Alpha 8 SE E, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Alpha 8 SE ETokyo Electron | |
|---|---|---|
| OEM | CEE | Tokyo Electron |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CEE 1000 Hot Plate | Tokyo Electron Alpha |
| Specifications | ||
| Configuration | 4"[1] | Vertical gas diffusion[2] |
| Type | Hot Plate[1] | Vertical gas diffusion furnace[2] |
| Wafer Size | 4 inch[1] | — |
| Voltage | — | 480 V[2] |
| Frequency | — | 60 Hz[2] |
| Phase | — | Toshiba 3 phase induction motor (2)[2] |
| Wafer size | — | 8 inch[2] |
| Drive motors | — | Toshiba three-phase induction motor (2)[2] |
| Vintage | — | 2000[2] |
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