Tokyo Electron
Alpha 8 SE E
The Tel Alpha 8 SE E is a vertical gas diffusion furnace manufactured by Tokyo Electron. The Alpha 8 SE E supports 8-inch wafers. The Alpha 8 SE E operates at 480 V and 60 Hz and is equipped with two Toshiba three-phase induction motors.[1]
What it is
The Tokyo Electron Alpha 8 SE E is a vertical diffusion furnace used for thermal processing in semiconductor manufacturing.[1]
How it works
General reference — not yet source-verifiedProcess gases are introduced into the tube at controlled temperatures and pressures to perform thermal diffusion, oxidation, or annealing.
The furnace uses resistive heating elements to raise the temperature of the process zone, while gas flow and temperature are precisely regulated to ensure uniform processing across the wafer batch.
Where it fits in the process flow
General reference — not yet source-verifiedThe Alpha 8 SE E is positioned in the front-end-of-line (FEOL) portion of semiconductor fabrication, where thermal processes such as doping, oxidation, and annealing are carried out after lithography and before metallization.
Vertical diffusion furnaces like the Alpha 8 SE E are typically used in batch processing, allowing multiple wafers to be processed simultaneously in a single run, improving throughput for thermal steps.
Applications
General reference — not yet source-verifiedThe Alpha 8 SE E is used for thermal diffusion of dopants into silicon wafers, thermal oxidation to grow silicon dioxide layers, and annealing to repair crystal damage or activate dopants.
Why won't it start?
Documented failure modes, common issues, and field considerations.
- HDD removed
What do the numbers mean?
Power & electrical3
Wafer handling1
Gas & chemistry2
- Vertical gas diffusion[1]
Configuration & options3
- HDD removed[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Alpha 8 SE E are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Alpha 8 SE E are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Alpha 8 SE E are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Alpha 8 SE E are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Alpha 8 SE E is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Alpha 8 SE E are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Oct 12, 2026.
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