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Comparison ledger

300 Bake Plateversus58TA

CEE 300 Bake Plate, YES 58TA, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
58TAYES
OEMCEEYES
CategoryThermal / DiffusionThermal / Diffusion
Wafer size300mm300mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 300 Bake PlateYES 58TA
Cited variants
  • Apogee Benchtop 300 Bake Plate[1]
  • Apogee Flange Mount 300 Bake Plate[1]
  • Apogee X-Pro 300 Bake Plate[1]
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Specifications
Wafer sizeup to 300mm wafer[2]—
SoftwareInternal OS[2]—
Voltage208V[2]—
Max Substrate Size300mm round or 12" x 12" square[1]—
Min Substrate Size4 inch round[1]—
Max Temperature300°C (400°C optional)[1]—
Temperature Resolution0.1°C[1]—
Temperature Uniformity±0.3% across working area[1]—
Smart Pin Height Range0-19 mm[1]—
Weight (machine only)146 lb (66.2 kg)[3]—
Dimensions18" H x 18.75" W x 26.25" D[3]—
Power3100-4100 watts[3]—
Exhaust Port2" (50.8mm) OD[3]—
Vacuum2" (50.8mm) OD[5]—
Temperature rangeambient to 300°C (400°C optional)[6]—
Bake methodscontact, vacuum and proximity[6]—
Smart Pin height range0 to 19 mm, programmed in 0.1 mm increments[6]—
Weight146 lb (66.2 kg) excluding accessories[6]—
Nitrogen for proximity baking35 psi (241 kPa)[6]—
Exhaust2" OD[6]—
Operation temperature—ambient to 180 °C[7]
Image reversal bake throughput—1 load/hour[7]
Vacuum bake/vapor prime throughput—2 loads/hour[7]
Wafer handling—handles wafers up to 300 mm[7]
Process control—fully programmable process time and temperature[7]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]costeffectiveequipment.comcosteffectiveequipment.com
  2. [2]inventory listing
  3. [3]sistemtechnology.comsistemtechnology.com
  4. [4]waferpedia.comwaferpedia.com
  5. [5]waferpedia.comwaferpedia.com
  6. [6]sistemtechnology.comsistemtechnology.com
  7. [7]pnf.uchicago.edupnf.uchicago.edu