YES
58TA
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- Image reversal bake
- Vapor prime
- Vacuum bake
What do the numbers mean?
Vacuum & pumping1
Wafer handling1
Performance1
Control & software1
Configuration & options1
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Vacuum bake/vapor prime throughput2 loads/hour[1]
Where are the manuals?
Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.
- YES Image Reversal Oven InstructionsManualcornell.edu
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What process functions does the YES-58TA support?
It supports image reversal bake, vapor prime, and vacuum bake.[1]
What is the operating temperature range?
The operation temperature ranges from ambient to 180 °C.[1]
What wafer size can it handle?
It handles wafers up to 300 mm.[1]
What does the system use NH3 vapor for?
It uses NH3 vapor to allow the creation of negative images using a positive photo-resist.[1]
Not publicly documented
The following facts about the 58TA are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 58TA are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 58TA are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 58TA are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 58TA are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 58TA is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]pnf.uchicago.edu — pnf.uchicago.edupnf.uchicago.edu
- [2]YES Image Reversal Oven Instructions — cnfusers.cornell.educnfusers.cornell.edu
- [3]Yield Engineering Systems, Inc. > Products > Vacuum Bake Systems > TA Series — yieldengineering.com (Mar 29, 2012)web.archive.org
Last updated Jul 29, 2026.
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