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Comparison ledger

300 Bake PlateversusPBX4-300

CEE 300 Bake Plate, YES PBX4-300, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMCEEYES
CategoryThermal / DiffusionThermal / Diffusion
Wafer size300mm300mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 300 Bake PlateYES PBX4-300
Cited variants
  • Apogee Benchtop 300 Bake Plate[1]
  • Apogee Flange Mount 300 Bake Plate[1]
  • Apogee X-Pro 300 Bake Plate[1]
  • YES-PBX4-300[2]
Specifications
Wafer sizeup to 300mm wafer[3]—
SoftwareInternal OS[3]—
Voltage208V[3]—
Max Substrate Size300mm round or 12" x 12" square[1]—
Min Substrate Size4 inch round[1]—
Max Temperature300°C (400°C optional)[1]—
Temperature Resolution0.1°C[1]—
Temperature Uniformity±0.3% across working area[1]—
Smart Pin Height Range0-19 mm[1]—
Weight (machine only)146 lb (66.2 kg)[4]—
Dimensions18" H x 18.75" W x 26.25" D[4]—
Power3100-4100 watts[4]—
Exhaust Port2" (50.8mm) OD[4]—
Vacuum2" (50.8mm) OD[6]—
Temperature rangeambient to 300°C (400°C optional)[7]—
Bake methodscontact, vacuum and proximity[7]—
Smart Pin height range0 to 19 mm, programmed in 0.1 mm increments[7]—
Weight146 lb (66.2 kg) excluding accessories[7]—
Nitrogen for proximity baking35 psi (241 kPa)[7]—
Exhaust2" OD[7]—
Product line—Fully Automated 300mm and 200mm Polyimide/BCB/Copper Anneal/Vacuum Bake System[2]
Model—YES-PBX4-300[2]
System type—Fully automated polyimide/BCB/copper anneal and vacuum bake system[2]
Wafer size compatible—300mm and 200mm[2]
Category—Thermal / Diffusion[8]
Product family—YES PBX4-300[9]

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Sources (9)Every fact above is drawn from these public sources
  1. [1]costeffectiveequipment.comcosteffectiveequipment.com
  2. [2]web.archive.orgweb.archive.org
  3. [3]inventory listing
  4. [4]sistemtechnology.comsistemtechnology.com
  5. [5]waferpedia.comwaferpedia.com
  6. [6]waferpedia.comwaferpedia.com
  7. [7]sistemtechnology.comsistemtechnology.com
  8. [8]waferpedia.comwaferpedia.com
  9. [9]waferpedia.comwaferpedia.com