Waferpedia

Tool family

YES PBX4-300

YESThermal / Diffusion1 entry

The PBX4-300 is listed as a fully automated 300mm and 200mm polyimide/BCB/copper anneal and vacuum bake system.

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Models in this family

  1. PBX4-300

    Cited variants

    DesignationGenerationVintageChangesSource
    YES-PBX4-300———web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org