Comparison ledger
CHA Mark 40 CV RH-PC/PLC Vacuum, Edwards E 306, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | E 306Edwards | |
|---|---|---|
| OEM | CHA | Edwards |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CHA Mark 40 | Edwards E 306 |
| Specifications | ||
| System Wiring | 120/280 V[2] | — |
| Phase | 3 Phase, 5 Wire, 60 cycle[2] | — |
| Configuration | 26" Diameter by 26" Long Process Chamber[2] | Missing components for high voltage[4] |
| Process Chamber Diameter | 26 inches[2] | — |
| Process Chamber Length | 26 inches[2] | — |
| Cryopump Model | Brooks CTI On-Board 400 Cryopump[2] | — |
| Dry Pump Model | Ebara Model EV-A10-2U Dry Pump[2] | — |
| High-Vacuum Valve | VAT High-Vac Valve[2] | — |
| Ionization Gauge Controller | Granville-Phillips Model 307 Digital Ionization Gauge Controller[2] | — |
| Electron Beam Gun | CHA SmartSource Electron Beam Gun with Motor Driven Crucible Rotation and Lid Lift[2] | — |
| Auto Regeneration Control | CTI On-Board Auto Regeneration Control[2] | — |
| Chamber Door Type | Water Cooled Chamber Front Door[2] | — |
| Rear Chamber Door | Hinged Rear Chamber Door[2] | — |
| Chamber Shields | Complete Sets of Chamber Shields[2] | — |
| Cabinet | Modern Metal Cabinet[2] | — |
| Electrical Drop Box | Single Service Electrical Drop Box[2] | — |
| Soft Vent | Present[3] | — |
| Soft Roughing | Present[3] | — |
| Lift-Off Fixturing | Present[3] | — |
| Source Viewing Mirror Array | Present[2] | — |
| Flag Shutter Assembly | Present[2] | — |
| RGA Isolation Valve and Interlock | Present[2] | — |
| System Indication Light Tower | Present[2] | — |
| Chamber Size | 26" Diameter by 26" Long Process Chamber[2] | — |
| Chamber Door | Water Cooled Chamber Front Door, Hinged Rear Chamber Door[2] | — |
| Vacuum Pump | Brooks CTI On-Board 400 Cryopump[2] | — |
| Dry Pump | Ebara Model EV-A10-2U Dry Pump[2] | — |
| Electrical Power | 120/280 V, 3 Phase, 5 Wire, 60 cycle[2] | — |
| OEM | — | Edwards[4] |
| Model | — | E 306[4] |
| Tool type | — | Evaporator[4] |
| Category | — | Deposition[1] |
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