CHA
Mark 40 CV RH-PC/PLC Vacuum
The CHA Mark 40 CV RH-PC/PLC is a vacuum evaporator, a type of deposition tool. The CHA Mark 40 CV RH-PC/PLC includes a 26-inch diameter by 26-inch long process chamber and a CHA SmartSource electron beam gun.[1][2][3]
What it is
How it works
The CHA Mark 40 CV RH-PC/PLC Vacuum includes a CHA SmartSource Electron Beam Gun with motor-driven crucible rotation and lid lift.[1][3]
The CHA Mark 40 CV RH-PC/PLC Vacuum includes a vacuum main folding, a VAT high-vac valve, a Brooks CTI on-board water pump package and compress, a Brooks CTI on-board 400 cryopump, an Ebara Model EV-A10-2U dry pump, and a Granville-Phillips Model 307 digital ionization gauge controller.[1][3]
Where it fits in the process flow
Applications
What do the numbers mean?
Power & electrical5
- Single Service Electrical Drop Box[1]
Vacuum & pumping11
Optics & imaging1
- Electron Beam Gun
- CHA SmartSource Electron Beam Gun with Motor Driven Crucible Rotation and Lid Lift[1]
Control & software4
Configuration & options24
- 26" Diameter by 26" Long Process Chamber[1]
- Water Cooled Chamber Front Door[1]
- Hinged Rear Chamber Door[1]
- Complete Sets of Chamber Shields[1]
- VAT High-Vac Valve[1]
- Modern Metal Cabinet[1]
- Soft Vent[1]
- Lift-Off Fixturing[1]
- Source Viewing Mirror Array[1]
- Flag Shutter Assembly[1]
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Edwards E 306— Same function class: Deposition, nullCompare in depthsource[4]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- System Wiring120/280 V[1]
- Phase3 Phase, 5 Wire, 60 cycle[1]
- ConfigurationBrooks CTI On-Board Water Pump Package and Compress[1]
- ConfigurationBrooks CTI On-Board 400 Cryopump[1]
- ConfigurationEbara Model EV-A10-2U Dry Pump[1]
- ConfigurationVacuum Main Folding[1]
- ConfigurationSingle Service Electrical Drop Box[1]
- ConfigurationSoft Roughing[1]
- Cryopump ModelBrooks CTI On-Board 400 Cryopump[1]
- Dry Pump ModelEbara Model EV-A10-2U Dry Pump[1]
- High-Vacuum ValveVAT High-Vac Valve[1]
- Electrical Drop BoxSingle Service Electrical Drop Box[1]
- Soft RoughingPresent[2]
- Vacuum PumpBrooks CTI On-Board 400 Cryopump[1]
- Dry PumpEbara Model EV-A10-2U Dry Pump[1]
- Electrical Power120/280 V, 3 Phase, 5 Wire, 60 cycle[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of tool is the CHA Mark 40 CV RH-PC/PLC Vacuum?
The CHA Mark 40 CV RH-PC/PLC Vacuum is a vacuum evaporator used for deposition.[2]
What electron-beam hardware does the CHA Mark 40 CV RH-PC/PLC Vacuum include?
The CHA Mark 40 CV RH-PC/PLC Vacuum includes a CHA SmartSource electron beam gun with motor-driven crucible rotation and lid lift.[1][2][3]
What pumping and vacuum-control components are included?
The CHA Mark 40 CV RH-PC/PLC Vacuum includes a VAT high-vac valve, a Brooks CTI on-board water pump package and compressor, a Brooks CTI on-board 400 cryopump, an Ebara Model EV-A10-2U dry pump, a vacuum main folding, and a Granville-Phillips Model 307 digital ionization gauge controller.[1][3]
Not publicly documented
The following facts about the Mark 40 CV RH-PC/PLC Vacuum are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Mark 40 CV RH-PC/PLC Vacuum are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Mark 40 CV RH-PC/PLC Vacuum are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Mark 40 CV RH-PC/PLC Vacuum are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Mark 40 CV RH-PC/PLC Vacuum are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Mark 40 CV RH-PC/PLC Vacuum is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]CHA Mark 40 CV RH-PC/PLC Vacuum Evaporator | SemiStar — semistarcorp.comsemistarcorp.com
- [4]waferpedia.comwaferpedia.com
Last updated Oct 11, 2026.
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