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CHA

Mark 40 CV RH-PC/PLC Vacuum

DepositionCHA Mark 40 family
Research Quality: 30% complete
Mark 40 CV RH-PC/PLC Vacuum — Inventory photo
Fig. 01Mark 40 CV RH-PC/PLC VacuumInventory photo[1]

Power

120/280 V[1]

Vacuum

Brooks CTI On-Board 400 Cryopump[1]

What is it?

The CHA Mark 40 CV RH-PC/PLC is a vacuum evaporator.

What do the numbers mean?

Power & electrical3

System Wiring
120/280 V[1]
Accurate?
Phase
3 Phase, 5 Wire, 60 cycle[1]
Accurate?
Single Service Electrical Drop Box[1]
Accurate?

Vacuum & pumping5

Brooks CTI On-Board Water Pump Package and Compress[1]
Accurate?
Brooks CTI On-Board 400 Cryopump[1]
Accurate?
Ebara Model EV-A10-2U Dry Pump[1]
Accurate?
Vacuum Main Folding[1]
Accurate?
Soft Roughing[1]
Accurate?

Control & software2

CTI On-Board Auto Regeneration Control[1]
Accurate?
Granville-Phillips Model 307 Digital Ionization Gauge Controller[1]
Accurate?

Configuration & options10

26" Diameter by 26" Long Process Chamber[1]
Accurate?
Water Cooled Chamber Front Door[1]
Accurate?
Hinged Rear Chamber Door[1]
Accurate?
Complete Sets of Chamber Shields[1]
Accurate?
VAT High-Vac Valve[1]
Accurate?
Modern Metal Cabinet[1]
Accurate?
Soft Vent[1]
Accurate?
Lift-Off Fixturing[1]
Accurate?
Source Viewing Mirror Array[1]
Accurate?
Flag Shutter Assembly[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • System Wiring120/280 V[1]
  • Phase3 Phase, 5 Wire, 60 cycle[1]
  • ConfigurationBrooks CTI On-Board Water Pump Package and Compress[1]
  • ConfigurationBrooks CTI On-Board 400 Cryopump[1]
  • ConfigurationEbara Model EV-A10-2U Dry Pump[1]
  • ConfigurationVacuum Main Folding[1]
  • ConfigurationSingle Service Electrical Drop Box[1]
  • ConfigurationSoft Roughing[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Mark 40 CV RH-PC/PLC Vacuum are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Mark 40 CV RH-PC/PLC Vacuum are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Mark 40 CV RH-PC/PLC Vacuum are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Mark 40 CV RH-PC/PLC Vacuum are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Mark 40 CV RH-PC/PLC Vacuum are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Mark 40 CV RH-PC/PLC Vacuum is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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