Edwards
E 306
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
The Edwards E 306 uses a deposition chamber with an electron-gun evaporation arrangement, shutters, sample mounting on a stage, a crystal monitor near the stage, and an ion gauge.[3]
Where it fits in the process flow
General reference — not yet source-verifiedThe Edwards E 306 sits in the deposition step of a fabrication flow after substrate preparation and before later patterning or integration steps.
Evaporation deposition is commonly used when a process needs a thin film of metal or other evaporatable material on a wafer or similar substrate. The process is typically followed by metrology or further layer processing.
Applications
General reference — not yet source-verifiedEvaporator tools in this class are used for vacuum film formation on substrates that require controlled coating thickness and deposition uniformity.
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Missing components for high voltage
What do the numbers mean?
Power & electrical1
- Missing components for high voltage[1]
Configuration & options4
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- CHA Mark 40 CV RH-PC/PLC Vacuum— Same function class: Deposition, nullCompare in depthsource[2]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationMissing components for high voltage[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the Edwards E 306?
It is an evaporator.[1]
Not publicly documented
The following facts about the E 306 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the E 306 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the E 306 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the E 306 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the E 306 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the E 306 are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]E 306 A — Edwards | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 12, 2026.
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