Comparison ledger
Disco dad3240-dicing-saw, EV Group 850 LT SOI Fusion Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | dad3240-dicing-sawDisco | 850 LT SOI Fusion WaferEV Group |
|---|---|---|
| OEM | Disco | EV Group |
| Category | Packaging & Bonding | Packaging & Bonding |
| Wafer size | 200mm | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Disco dad3240-dicing-saw | EV Group 850 |
| Specifications | ||
| vendor | Disco[1] | — |
| model | DFL7340[1] | — |
| process area | Packaging[1] | — |
| compatible materials | Si wafers only[1] | — |
| engine | SDE03 engine with λ = 1342 nm[1] | — |
| maximum sample diameter | 200 mm[1] | — |
| dicing orientation | Topside or backside (through tape) dicing possible[1] | — |
| Wafer size | 200mm[2] | Suitable for wafer sizes up to 8"/200mm wafers[3] |
| Configuration | — | Fully-Automatic[3] |
| OEM | — | EV Group[4] |
| Model | — | 850 LT SOI Fusion Wafer[3] |
| Category | — | Packaging & Bonding[4] |
| Automation | — | Fully-automatic[4] |
| Cleaning module | — | One Cleaning Module[3] |
| Spinner chuck | — | One Spinner Chuck for 8”/200mm wafers[3] |
| DI water dispense line | — | One DI Water Dispense Line[3] |
| Robot / pre-aligner | — | One Genmark Robot with pre-aligner[3] |
| Low-temperature plasma activation module | — | One LowTemp Plasma Activation Module[3] |
| High-frequency RF generator | — | High Frequency RF Generator with Matching Unit[3] |
| Low-frequency RF generator | — | Low Frequency RF Generator with Matching Unit[3] |
| Control interface | — | PC controlled with windows based graphical user interface[3] |
| Access control | — | Password protected access levels[3] |
| Cleaning speed | — | Programmable rotational speed for substrate cleaning[3] |
| Configured wafer size | — | 8-inch/200mm wafers[3] |
| Plasma activation module | — | One LowTemp Plasma Activation Module[3] |
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