Disco
Wafer size
200mm
Optics
SDE03 engine with λ = 1342 nm[1]
Process applications and technology nodes documented for this tool.
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It is dedicated to dicing silicon wafers only.[1]
The maximum sample diameter is 200 mm.[1]
Yes. Backside dicing through tape is possible.[1]
The dicing streets must be smooth and mirror polished where the laser is incident, and the street area must be metal-free within a width of 0.4 times the substrate thickness centered on the dicing street.[1]
Silicon resistivity must be greater than 0.01 ohm-centimeter.[1]
The following facts about the dad3240-dicing-saw are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the dad3240-dicing-saw are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the dad3240-dicing-saw are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the dad3240-dicing-saw are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the dad3240-dicing-saw are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the dad3240-dicing-saw is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Jul 29, 2026.
The EV Group 850 LT SOI Fusion Wafer Bonder is a fully automatic wafer bonder configured for 8-inch/200mm wafers.
The Disco DFL7340 is a stealth dicing system used for silicon wafer dicing.
The Disco DFL7340 stealth dicing system is used for dicing silicon wafers and is dedicated to Si wafers only.
The EVG Gemini Automated Production Wafer Bonder is a wafer bonder with face-to-face alignment and automation features, supporting wafers up to 8"/200mm.