Waferpedia

Disco

dad3240-dicing-saw

Discodad3240-dicing-saw
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Wafer size

200mm

Optics

SDE03 engine with λ = 1342 nm[1]

What is it?

The source describes the Disco DFL7340 stealth dicing system as an equipment item in the packaging area for dicing silicon wafers. It states that the system is dedicated to Si wafers only, uses an SDE03 engine with λ = 1342 nm, allows topside or backside (through tape) dicing, and supports a maximum sample diameter of 200 mm.

What can it run?

Process applications and technology nodes documented for this tool.

  • Dicing silicon wafers

What do the numbers mean?

Wafer handling1

compatible materials
Si wafers only[1]
Accurate?

Optics & imaging1

engine
SDE03 engine with λ = 1342 nm[1]
Accurate?

Configuration & options5

vendor
Disco[1]
Accurate?
model
DFL7340[1]
Accurate?
process area
Packaging[1]
Accurate?
maximum sample diameter
200 mm[1]
Accurate?
dicing orientation
Topside or backside (through tape) dicing possible[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What material is this dicer intended for?

It is dedicated to dicing silicon wafers only.[1]

What is the maximum wafer or sample size it handles?

The maximum sample diameter is 200 mm.[1]

Can it dice from the backside?

Yes. Backside dicing through tape is possible.[1]

What wafer surface conditions are required in the dicing streets?

The dicing streets must be smooth and mirror polished where the laser is incident, and the street area must be metal-free within a width of 0.4 times the substrate thickness centered on the dicing street.[1]

What silicon resistivity is required?

Silicon resistivity must be greater than 0.01 ohm-centimeter.[1]

Not publicly documented

The following facts about the dad3240-dicing-saw are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the dad3240-dicing-saw are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the dad3240-dicing-saw are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the dad3240-dicing-saw are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the dad3240-dicing-saw are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the dad3240-dicing-saw is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]confluence.nanofab.ualberta.caconfluence.nanofab.ualberta.caconfluence.nanofab.ualberta.ca
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Last updated Jul 29, 2026.

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