Comparison ledger
EV Group 101 Spray, Leica , Vistec INS 3000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 101 SprayEV Group | , Vistec INS 3000Leica |
|---|---|---|
| OEM | EV Group | Leica |
| Category | — | — |
| Wafer size | 2" | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | EV Group 101 Spray | Leica , Vistec INS 3000 |
| Specifications | ||
| Configuration | Semi-Automatic, with Manual loading[1] | — |
| Wafer size | Suitable for wafer sizes 2" - 4" (with proper chucks and pre-aligner).[1] | Single 150/200 mm wafer loadport[2] |
| Type | — | Optical defect review station[2] |
| Wafer loadport | — | Single 150/200 mm wafer loadport[2] |
| Lighting | — | Bright field light source; DIC DUV light source[2] |
| Camera | — | UV and DUV camera[2] |
| Optics | — | 6 optics: 150x, 100x, 50x, 25x, 10x, 5x[2] |
| Software | — | Viscon Software[2] |
| Data interface | — | KLARF input[2] |