EV Group

101 Spray

2"EV Group 101 Spray family

Research Quality: 30% complete

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101 Spray — Inventory photo — Fig. 01101 SprayInventory photo^[1]

Wafer size

Vacuum

1 Vacuum Wand for wafer handling^[1]

What is it?

The EVG 101 Spray Coater is a semi-automatic wafer spray coating system configured for 2-inch to 4-inch wafers.

What do the numbers mean?

Power & electrical1

Lechler HF Power Supply / HF Atomizer Control Unit^[1]

Accurate?

Vacuum & pumping3

Base frame for one resist processing module including all electronics, pneumatics, tubing for solvents, and exhaust lines^[1]
Wafer size: 1 Vacuum Wand for wafer handling^[1]; Exhaust Controller included^[1]

Wafer handling4

Wafer size: Suitable for wafer sizes 2" - 4" (with proper chucks and pre-aligner).^[1]; Currently configured for 3" & 4" wafers^[1]; Programmable rotational speed for substrate^[1]; Spinner chucks for 1" - 3" and 4" - 6" wafers^[1]

Control & software1

PC controlled with windows based graphical user interface^[1]

Accurate?

Configuration & options8

Semi-Automatic, with Manual loading^[1]

Accurate?

One Spray Coat Module^[1]

Accurate?

One Cleaning Module^[1]

Accurate?

Manual loading and mechanical pre-aligner (pneumatically actuated)^[1]

Accurate?

Password protected access levels^[1]

Accurate?

Syringe dispense for spray nozzle option included^[1]

Accurate?

4 Floor Mounting Brackets included^[1]

Accurate?

Operations Manual and Documentation included^[1]

Accurate?

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationBase frame for one resist processing module including all electronics, pneumatics, tubing for solvents, and exhaust lines^[1]
Wafer size1 Vacuum Wand for wafer handling^[1]
ConfigurationLechler HF Power Supply / HF Atomizer Control Unit^[1]
ConfigurationExhaust Controller included^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the 101 Spray are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 101 Spray are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 101 Spray are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 101 Spray are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 101 Spray are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 101 Spray is not on record.
Answerable by: an OEM datasheet or a fab qualification report