Comparison ledger
Filmetrics F10-RT, Leica , Vistec INS 3000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | F10-RTFilmetrics | , Vistec INS 3000Leica |
|---|---|---|
| OEM | Filmetrics | Leica |
| Category | — | — |
| Wafer size | 6" | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Filmetrics F10-RT | Leica , Vistec INS 3000 |
| Specifications | ||
| Instrument type | optical spectrometer[1] | — |
| Use in source example | measured reflectivity of a 9-period SiO2/Ta2O5 DBR[2] | — |
| Example measurement wavelength | high reflectivity at approximately 1050 nm[2] | — |
| Alternate name | F10RT[1] | — |
| Measurement capability | Reflectivity[2] | — |
| Wafer size | — | Single 150/200 mm wafer loadport[3] |
| Type | — | Optical defect review station[3] |
| Wafer loadport | — | Single 150/200 mm wafer loadport[3] |
| Lighting | — | Bright field light source; DIC DUV light source[3] |
| Camera | — | UV and DUV camera[3] |
| Optics | — | 6 optics: 150x, 100x, 50x, 25x, 10x, 5x[3] |
| Software | — | Viscon Software[3] |
| Data interface | — | KLARF input[3] |