Filmetrics

F10-RT

6"Filmetrics F10-RT family

Research Quality: 30% complete

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FilmetricsF10-RT

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Wafer size

Optics

optical spectrometer^[1]

What is it?

The sources mention the Filmetrics F10-RT in the context of measuring reflectivity for a 9-period SiO2/Ta2O5 DBR, with high reflectivity at approximately 1050 nm. It is also listed as an optical spectrometer associated with the NanoFab staff page.

What can it run?

Process applications and technology nodes documented for this tool.

optical spectrometer use
reflectivity measurement

What do the numbers mean?

Optics & imaging2

Instrument type: optical spectrometer^[1]2 sources
Example measurement wavelength: high reflectivity at approximately 1050 nm^[2]

Configuration & options2

Use in source example: measured reflectivity of a 9-period SiO2/Ta2O5 DBR^[2]
Alternate name: F10RT^[1]

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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the F10-RT are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the F10-RT are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the F10-RT are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the F10-RT are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the F10-RT are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the F10-RT is not on record.
Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources

[1]wiki.nanofab.ucsb.edu — wiki.nanofab.ucsb.eduwiki.nanofab.ucsb.edu
[2]wiki.nanotech.ucsb.edu — wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu
[3]Demis D. John - UCSB Nanofab Wiki — wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu

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Last updated Jul 29, 2026.

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