Comparison ledger
Headway PWM 32 PS CB 15 Spinner, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | PWM 32 PS CB 15 SpinnerHeadway | 1000PYES |
|---|---|---|
| OEM | Headway | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Acquisition |
| Control system | — | — |
| Generation | — | — |
| Family | Headway PWM 32 PS CB 15 Spinner | YES 1000P |
| Cited variants |
| — |
| Specifications | ||
| Configuration | Used with organic solvents[2] | Parallel plate[5] |
| Voltage | 115 Vac[2] | — |
| Model | PWM 32 PS CB 15[2] | 1000P[4] |
| Model designation | PWM32-PS-CB15 Spinner System[1] | — |
| Bowl | Circular bowl, 15" diameter[1] | — |
| Process use | Used with organic solvents[2] | — |
| Stage | Vacuum stage[2] | — |
| Power | 115 Vac[2] | 1000 W[5] |
| Frequency | 50/60 Hz[2] | — |
| Powered lid option | CB15 Powered Lid Option[1] | — |
| Process category | Wet Processing / Clean[3] | — |
| Vacuum | Vacuum stage[3] | — |
| Gas delivery / process use | Used with organic solvents[2] | — |
| System type | — | Plasma cleaning system[4] |
| Shelf configuration | — | Four 16 x 16 inch shelves[4] |
| Total capacity | — | 1024 square inches[4] |
| Control system | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[4] |
| Number of shelves | — | 4[4] |
| Shelf size | — | 16 x 16 inches[4] |
| Operation modes | — | Active, RIE, Downstream[4] |
| Sample size range | — | From smallest semiconductor chip to large flat panels[4] |
| Type | — | Plasma cleaning system[4] |
| Shelves | — | Four 16 x 16 inch shelves[4] |
| Control | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[4] |
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