PWM 32 PS CB 15 Spinner

The Headway PWM 32 PS CB 15 Spinner is a spin-processing machine used in wet processing and cleanroom work. The Headway PWM 32 PS CB 15 Spinner uses a vacuum stage. The Headway PWM 32 PS CB 15 Spinner is configured for 115 Vac operation at 50/60 Hz. The Headway PWM 32 PS CB 15 Spinner is used with organic solvents.^[2][1]

The CB15 powered lid option uses a pneumatic actuator to open and close the lid. The lid can be operated by tabletop switches or a footswitch. The PWM32 controller can automate lid closing and opening as part of the programmed cycle. The lid is designed to close quickly at first and then slow for a gentle final close. The lid control reduces closing pressure near the closed position and then restores maximum pressure after unobstructed closure. A safety circuit prevents lid motion while the spinner motor is turning. The lid will not close when the accessory substrate lifter is in the up position. The substrate lifter will not lift a substrate when the lid is closed. An interlock prevents the start of a spin cycle unless the lid is closed.^[3][4]

The Headway PWM 32 PS CB 15 Spinner is intended for substrates that are loaded and unloaded within a closed-lid bowl arrangement using a vacuum stage. The Headway PWM 32 PS CB 15 Spinner can be used with the CB15 powered lid option to automate lid movement during the programmed cycle. The bowl exhaust is part of the spin coating process in critical coating applications and can be monitored and regulated.^[1][4]

The PWM32-PS-CB15 is intended for relatively light loads such as silicon wafers and small photomasks. The Headway PWM 32 PS CB 15 Spinner is used with organic solvents. The CB15 package can also be fitted with an accessory exhaust damper and bowl cover for closed-chamber inhibited drying spin coating.^[2][4]