Comparison ledger
Hitachi S 7840 CD-SEM, KLA 0035235-003 MMD Head, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 7840 CD-SEMHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 7840 CD-SEM | KLA 0035235-003 MMD Head |
| Specifications | ||
| Configuration | Refurbished[1] | TSTD PCB ASSY, MMD MEAS HEAD[2] |
| SW Version | 11[1] | — |
| OEM | Hitachi[1] | — |
| Model | S 7840[1] | 0035235-003[2] |
| Tool type | Critical Dimension Scanning Electron Microscope (CD-SEM)[1] | — |
| Wafer sizes | 8, 6 inch[1] | — |
| Software version | 11[1] | — |
| Features | SECS; Multipoint Measurement; Hole Measurement; Reduced Scan; Image Database; CP Controller; Save to DOS FD; IP Read; Operator Accessories[1] | — |
| Vintage | 2001 Vintage[1] | — |
| Make | — | KLA[2] |
| Part Description | — | TSTD PCB ASSY, MMD MEAS HEAD[2] |
| Compatible System | — | KLA AIT-XP[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →