Hitachi
S 7840 CD-SEM
How it works
The Hitachi S 7840 includes multipoint measurement, hole measurement, reduced scan, and an image database. The Hitachi S 7840 also includes a CP controller, save to DOS FD, and IP read.[2]
Applications
The Hitachi S 7840 includes hole measurement and multipoint measurement functions. The Hitachi S 7840 also includes an image database feature.[2]
What do the numbers mean?
Wafer handling1
Control & software3
Dimensions & facilities1
Configuration & options13
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the Hitachi S 7840?
The Hitachi S 7840 is a critical dimension scanning electron microscope.[2]
What wafer sizes does the Hitachi S 7840 support?
The Hitachi S 7840 is configured for 6 inch and 8 inch wafers.[2]
What measurement functions are included on the Hitachi S 7840?
The Hitachi S 7840 includes multipoint measurement and hole measurement.[2]
What data or interface features are included on the Hitachi S 7840?
The Hitachi S 7840 includes SECS, an image database, save to DOS FD, and IP read.[2]
Not publicly documented
The following facts about the S 7840 CD-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 7840 CD-SEM are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S 7840 CD-SEM are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S 7840 CD-SEM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S 7840 CD-SEM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S 7840 CD-SEM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]inventory listing
Last updated Oct 15, 2026.
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