Comparison ledger
Hitachi S 7840 CD-SEM, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 7840 CD-SEMHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 7840 CD-SEM | KLA .204 PSL Wafer |
| Specifications | ||
| Configuration | Refurbished[1] | NIST Traceable[2] |
| SW Version | 11[1] | — |
| OEM | Hitachi[1] | — |
| Model | S 7840[1] | — |
| Tool type | Critical Dimension Scanning Electron Microscope (CD-SEM)[1] | — |
| Wafer sizes | 8, 6 inch[1] | — |
| Software version | 11[1] | — |
| Features | SECS; Multipoint Measurement; Hole Measurement; Reduced Scan; Image Database; CP Controller; Save to DOS FD; IP Read; Operator Accessories[1] | — |
| Vintage | 2001 Vintage[1] | — |
| Wafer Size | — | 8 inch[3] |
| Traceability | — | NIST[4] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[2] |
| NIST Traceable | — | Yes[3] |
| Compatible tools | — | Surfscan 6xy0 and Sp1 particle counters[3] |
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