Comparison ledger
Hitachi S4600, Ulvac UNECS-2000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S4600Hitachi | UNECS-2000Ulvac |
|---|---|---|
| OEM | Hitachi | Ulvac |
| Category | Measurement | Measurement |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | Windows | — |
| Generation | — | — |
| Family | Hitachi S4600 | Ulvac UNECS-2000 |
| Specifications | ||
| Equipment name | Hitachi S4600 SEM[1] | — |
| Instrument type | cold field emission high resolution scanning electron microscope[1] | — |
| Configured detections | secondary and backscattered electrons and characteristic X-rays[1] | — |
| Control software | menu driven software[1] | — |
| Operating system | Windows software[1] | — |
| Analysis capability | energy dispersive analysis[1] | — |
| Element range | boron through uranium[1] | — |
| Backscatter imaging capability | possible at accelerating voltages as low as 1 kV at high resolution[1] | — |
| Phase | 1 Phase[2] | — |
| Power | 4 kVA[2] | — |
| Frequency | 60 Hz[2] | — |
| Detected signals | secondary and backscattered electrons and characteristic X-rays[4] | — |
| Power frequency | 60 Hz[4] | — |
| Model | — | UNECS-2000[5] |
| OEM | — | ULVAC[5] |
| Equipment type | — | Ellipsometer[5] |
| Measurement category | — | Measurement[6] |
| Use | — | Measures refractive index and thickness of thin film[5] |
| High-speed measurement | — | 20 ms per point[5] |
| Visible spectral range | — | Standard type: 530 nm to 750 nm; visible spectral type: 380 nm to 760 nm[5] |
| Sensor unit | — | Light-weighted and very compact; no rotating mechanism; no periodic maintenance needed[5] |
| Measurement type | — | Spectroscopic ellipsometer[5] |
| Measured parameters | — | Refractive index and thickness of thin films[5] |
| Measurement speed | — | 20 ms per point[5] |
| Measurement method | — | Snapshot measurement method[5] |
| Spectral range (standard type) | — | 530 nm to 750 nm[5] |
| Spectral range (visible type) | — | 380 nm to 760 nm[5] |
| Sensor unit characteristics | — | Compact, light-weighted, no rotating mechanism, no periodic maintenance[5] |
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