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Ulvac

UNECS-2000

MeasurementUlvac UNECS-2000 family
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UlvacUNECS-2000
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What is it?

The ULVAC UNECS-2000 is listed as a measurement instrument, and its project page identifies it as a spectroscopic ellipsometer. The source states that the UNECS series measures the refractive index and thickness of thin films quickly and accurately, with a compact sensor unit and high-speed snapshot measurement.

What can it run?

Process applications and technology nodes documented for this tool.

  • Measurement of refractive index
  • Measurement of thin-film thickness

What do the numbers mean?

Optics & imaging1

Visible spectral range
Standard type: 530 nm to 750 nm; visible spectral type: 380 nm to 760 nm[1]
Accurate?

Dimensions & facilities1

Sensor unit
Light-weighted and very compact; no rotating mechanism; no periodic maintenance needed[1]
Accurate?

Configuration & options6

Model
UNECS-2000[1]
Accurate?
OEM
ULVAC[1]
Accurate?
Equipment type
Ellipsometer[1]
Accurate?
Measurement category
Measurement[2]
Accurate?
Use
Measures refractive index and thickness of thin film[1]
Accurate?
High-speed measurement
20 ms per point[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the UNECS-2000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the UNECS-2000 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the UNECS-2000 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the UNECS-2000 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the UNECS-2000 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the UNECS-2000 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]nanolab.ucla.edu — nanolab.ucla.edunanolab.ucla.edu
  2. [2]nanolab.ucla.edu — nanolab.ucla.edunanolab.ucla.edu
  3. [3]Equipment | UCLA Nanolab — nanolab.ucla.edunanolab.ucla.edu
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Last updated Jul 29, 2026.

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