S4600

The Hitachi S4600 is a scanning electron microscope used in measurement and characterization work. Scanning electron microscopes form images by scanning a focused electron beam across a specimen and collecting emitted signals that reveal surface morphology and compositional contrast.

The Hitachi S4600 SEM supports secondary imaging at short working distances with an overhead detector or at longer working distances with a side mounted detector. The Hitachi S4600 SEM allows those secondary electron detector signals to be isolated or mixed. The Hitachi S4600 SEM can perform backscatter imaging at accelerating voltages as low as 1 kV at high resolution with the ExB detector. The Hitachi S4600 SEM provides energy dispersive analysis with an ultra thin window detector. The Hitachi S4600 SEM can analyze elements from boron through uranium with that detection system.^[1][2]

Scanning electron microscopes are metrology and failure analysis tools rather than production patterning or deposition tools. Scanning electron microscopes are typically used after a specimen has been fabricated, coated, etched, cleaved, or otherwise prepared, and the resulting images or spectra inform later process tuning, defect review, or materials assessment.

The Hitachi S4600 SEM permits ultra high resolution imaging of thin films and semiconductor materials on exceptionally clean specimens. The Hitachi S4600 SEM is also suitable for polymeric materials. The Hitachi S4600 SEM supports X-ray mapping, qualitative analysis, standardless analysis, and standards based quantitative analysis.^[1][2]