Comparison ledger
KLA 0035235-003 MMD Head, Nikon NWL 851, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NWL 851Nikon | |
|---|---|---|
| OEM | KLA | Nikon |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 0035235-003 MMD Head | Nikon NWL 851 |
| Specifications | ||
| Configuration | TSTD PCB ASSY, MMD MEAS HEAD[1] | — |
| Model | 0035235-003[1] | NWL 851[2] |
| Make | KLA[1] | Nikon[2] |
| Part Description | TSTD PCB ASSY, MMD MEAS HEAD[1] | — |
| Compatible System | KLA AIT-XP[1] | — |
| Wafer size | — | 8 inch[2] |
| Type | — | Wafer loader[3] |
| Stage | — | Large 8-inch compatible stage[3] |
| Stage travel | — | X-Y stroke 205 mm[3] |
| Rotating holder | — | 8-inch rotating holder[3] |
| Observation methods | — | Reflected bright field / reflected dark field[3] |
| Objective lenses | — | CF Plan 5× BD NA0.135 / 10× BD NA 0.30 / 50× BD NA 0.80[3] |
| Eyepiece | — | CFIUW 10/25× 2 (magnification 10×, field of view 25 mm)[3] |
| Illumination device | — | LA 150 UX halogen lamp, 150 W[3] |
| Revolver | — | ACP 21 with motorized switching controller (5 holes)[3] |
| Tube | — | 3 erect images, with C-mount adapter[3] |
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