Comparison ledger
KLA 0035235-003 MMD Head, Veeco AFM-R1, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | AFM-R1Veeco | |
|---|---|---|
| OEM | KLA | Veeco |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 0035235-003 MMD Head | Veeco AFM-R1 |
| Specifications | ||
| Configuration | TSTD PCB ASSY, MMD MEAS HEAD[1] | — |
| Model | 0035235-003[1] | DiInnova[3] |
| Make | KLA[1] | — |
| Part Description | TSTD PCB ASSY, MMD MEAS HEAD[1] | — |
| Compatible System | KLA AIT-XP[1] | — |
| equipment type | — | Gloveboxed atomic force microscope[2] |
| Purpose | — | Scanning probe microscopy of semiconductor samples[3] |
| Vendor | — | Veeco Instruments Inc.[3] |
| System location | — | RAC1 inert atmosphere lab at the Quantum-Nano Fabrication and Characterization Facility at the University of Waterloo[4] |
| Environment | — | Installed in an ambient-controlled glovebox[5] |
| Operation mode | — | Tapping/contact mode[3] |
| Additional modes | — | Conductive and magnetic mapping modes[3] |
| Large area scanner default configuration | — | < 90 µm × 90 µm[3] |
| Maximum Z-range | — | < 7.5 µm[3] |
| Optional small area scanner | — | < 5 µm × 5 µm[3] |
| Optional small area scanner Z-range | — | < 1.5 µm[3] |
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