Comparison ledger
KLA .204 PSL Wafer, KLA 2138, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 2138KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA 2138 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Product name | — | KLA-2138[4] |
| Type | — | Wafer Inspection System[4] |
| Technology | — | Ultra-Broadband Technology[4] |
| Illumination source | — | Ultra-broadband (UBB) illumination source[4] |
| Optics | — | Significantly improved brightfield optics[4] |
| Detection technology | — | Segmented Auto Threshold (SAT) technology[4] |
| Optional configuration | — | Integrated SMIF minienvironment[4] |
| Optics type | — | Brightfield optics, significantly improved[4] |
| Integration | — | Available with integrated SMIF minienvironment[4] |
| Inspection type | — | Inline wafer inspection[4] |
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