Comparison ledger
KLA .204 PSL Wafer, KLA 8100 CD-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 8100 CD-SEMKLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA 8100 |
| Specifications | ||
| Configuration | NIST Traceable[1] | Missing parts[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Robot | — | ATM 105 1 S CE[4] |
| Pumps | — | Edwards iQDP 40 (2)[4] |
| Tool type | — | Critical Dimension Scanning Electron Microscope (CD-SEM)[4] |
| Wafer size | — | 8 inch[4] |
| Missing parts | — | Missing parts[4] |
| Category | — | Metrology & Inspection[5] |
| Configuration note | — | Missing parts[4] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →