Comparison ledger
KLA .204 PSL Wafer, KLA D600, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | D600KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 2" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | D-series |
| Family | KLA .204 PSL Wafer | KLA D600 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Instrument type | — | Stylus surface profiler[4] |
| Measurement purpose | — | Thin and thick film step height measurement[4] |
| Wafer compatibility | — | 2", 4", 6", and 8" wafers[4] |
| Field of view | — | 3780 x 3120 um[4] |
| Digital zoom | — | x4[4] |
| Scan length range | — | 55 mm with stitching option[4] |
| Vertical range | — | 1 mm[4] |
| Step-height repeatability | — | 5A[4] |
| Force range | — | 0.03 to 15 mg[4] |
| Digital Zoom | — | 4x digital zoom[4] |
| Step-Height Repeatability | — | 5A (5 angstroms)[4] |
| Measurement application | — | Advanced thin- and thick-film step height measurement[4] |
| Documentation | — | D Series User Manual[4] |
| Type | — | stylus surface profiler[4] |
| Measurement function | — | thin and thick film step height measurement[4] |
| Sample chuck | — | 200 mm sample chuck[6] |
| Measurement capability | — | 2D and 3D step heights from a few nanometers to 1200 µm[6] |
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