Waferpedia

Comparison ledger

.204 PSL WaferversusNS300

KLA .204 PSL Wafer, Malvern Panalytical NS300, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
NS300Malvern Panalytical
OEMKLAMalvern Panalytical
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferMalvern Panalytical NS300
Specifications
ConfigurationNIST Traceable[1]—
Wafer Size8 inch[2]—
TraceabilityNIST[3]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
NIST TraceableYes[2]—
Compatible toolsSurfscan 6xy0 and Sp1 particle counters[2]—
Measurement technique—Nanoparticle Tracking Analysis (NTA)[4]
Particle size range—30 to 800 nm[4]
Particle concentration range—10^6 to 10^9 particles/mL[4]
Laser wavelength—532 nm[4]
Temperature range—20 to 50 C[4]
Sample volume required—~1 mL[4]
Microscope magnification—20X[4]
Camera frame rate—30 frames per second[4]
Analysis range—30 to 800 nm[4]
Nanoparticle tracking analysis range—10 nm to 2000 nm, depending on instrument configuration and sample type[6]
Camera—20X magnification microscope and camera; camera takes 30 frames per second[4]
Laser class—Class 1 laser device; contains a Class 3B laser inside the laser module[6]
Temperature control—Fully programmable using the NTA software[6]
Laser modules—Interchangeable laser modules[5]
Filter wheel—Motorized 6-position filter wheel[5]
Camera type—High sensitivity sCMOS camera[8]
Power input—100-240V, 50/60Hz[8]
Interface—USB 2.0 input/output; Firewire B output[8]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (8)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]cnfusers.cornell.educnfusers.cornell.edu
  5. [5]malvernpanalytical.commalvernpanalytical.com
  6. [6]chem.uci.educhem.uci.edu
  7. [7]malvernpanalytical.commalvernpanalytical.com
  8. [8]cdn.labwrench.comcdn.labwrench.com